Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798308 | Temperature controller for semiconductor wafer and temperature control method for semiconductor wafer | — | 2017-10-24 |
| 9627603 | Quartz vibrator having a dome-shaped cap | Hiroaki Kaida, Manabu Ibayashi, Yoshifumi Saito, Yuichiro Nagamine, Katsuma Moroishi +1 more | 2017-04-18 |