Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE46465 | Wafer transfer apparatus and substrate transfer apparatus | — | 2017-07-04 |
| 9616577 | Robot having end effector and method of operating the same | Tetsuya Yoshida | 2017-04-11 |
| 9620401 | Pre-aligner apparatus | — | 2017-04-11 |