Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620405 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2017-04-11 |
| 9570336 | Substrate transfer system and substrate processing system | Yoshiki Kimura | 2017-02-14 |