Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831069 | CVD apparatus and method for forming CVD film | — | 2017-11-28 |
| 9818869 | Ferroelectric device and method of its manufacture | Shigeki Sakai, Mitsue Takahashi, Masayuki Toda, Masaru Umeda | 2017-11-14 |
| 9644264 | Evaporation method and film deposition method | Masayuki Toda, Masaru Umeda, Mitsuru Fukagawa | 2017-05-09 |