Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816004 | Lithography pattern forming method using self-organizing block copolymer | Ayako Kawanishi, Hiroki Yonemitsu | 2017-11-14 |
| 9696628 | Pattern forming method | Hideki Kanai | 2017-07-04 |
| 9685331 | Semiconductor device manufacturing method and pattern forming method | Ayako Kawanishi, Hiroki Yonemitsu | 2017-06-20 |