Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620353 | Method of manufacturing semiconductor device | Katsuhiro Sato, Masaaki Hirakawa | 2017-04-11 |
| 9536797 | Substrate treatment apparatus and substrate treatment method | Katsuhiro Sato, Keiko Morita, Hideaki Hirabayashi | 2017-01-03 |