Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728552 | Semiconductor memory device having voids between word lines and a source line | Atsushi Fukumoto, Fumiki Aiso | 2017-08-08 |
| 9558936 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | — | 2017-01-31 |