Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9849558 | Polishing pad dresser, polishing apparatus and polishing pad dressing method | Takayuki Nakayama | 2017-12-26 |
| 9748090 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Shinichi Hirasawa | 2017-08-29 |
| 9539696 | Retainer ring, polish apparatus, and polish method | Takashi Watanabe, Jun Takayasu | 2017-01-10 |