Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799482 | Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam | Yuichi Ohsawa, Junichi Ito, Chikayoshi Kamata, Megumi Yakabe, Saori Kashiwada | 2017-10-24 |
| 9583360 | Substrate processing apparatus and substrate processing method | Hisataka Hayashi, Keisuke Kikutani | 2017-02-28 |