Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812301 | Tungsten sintered compact sputtering target and method for producing same | Kazumasa Ohashi | 2017-11-07 |
| 9773651 | High-purity copper sputtering target | Tomio Otsuki, Shigeru Watanabe | 2017-09-26 |
| 9765425 | Copper alloy sputtering target, process for producing the same and semiconductor element wiring | — | 2017-09-19 |
| 9704695 | Sputtering target and manufacturing method therefor | Kenichi Nagata, Tomio Otsuki, Nobuhito Makino, Atsushi Fukushima | 2017-07-11 |