Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711336 | Backing plate-integrated metal sputtering target and method of producing same | — | 2017-07-18 |
| 9666418 | Titanium target for sputtering | Nobuhito Makino, Atsushi Fukushima, Kazuto Yagi, Eiji Hino | 2017-05-30 |
| 9536715 | Recycling method for tantalum coil for sputtering and tantalum coil obtained by the recycling method | — | 2017-01-03 |