Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845528 | Tantalum sputtering target | Atsushi Fukushima, Shinichiro Senda | 2017-12-19 |
| 9732413 | Ruthenium-alloy sputtering target | — | 2017-08-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845528 | Tantalum sputtering target | Atsushi Fukushima, Shinichiro Senda | 2017-12-19 |
| 9732413 | Ruthenium-alloy sputtering target | — | 2017-08-15 |