Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646841 | Group III arsenide material smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2017-05-09 |
| 9646842 | Germanium smoothing and chemical mechanical planarization processes | Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner, James A. Tornello +1 more | 2017-05-09 |