Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618101 | Actuator, sample positioning device, and charged particle beam system | — | 2017-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618101 | Actuator, sample positioning device, and charged particle beam system | — | 2017-04-11 |