Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9722026 | Semiconductor structure in which film including germanium oxide is provided on germanium layer, and method for manufacturing semiconductor structure | Akira Toriumi, Toshiyuki Tabata, Tomonori Nishimura, Cimang LU | 2017-08-01 |
| 9691620 | Semiconductor structure having film including germanium oxide on germanium layer and method of fabricating the same | Akira Toriumi | 2017-06-27 |
| 9647074 | Semiconductor-substrate manufacturing method and semiconductor-device manufacturing method in which germanium layer is heat-treated | Akira Toriumi, Tomonori Nishimura | 2017-05-09 |