Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9663862 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Jiro Matsuo | 2017-05-30 |