Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637415 | Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers | Suri A. Sastri, Lee M. Goldman | 2017-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637415 | Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers | Suri A. Sastri, Lee M. Goldman | 2017-05-02 |