Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552962 | Method of controlling an ion implanter in plasma immersion mode | Laurent Roux | 2017-01-24 |
| 9534287 | Machine for implanting ions in plasma immersion mode for a low-pressure method | Laurent Roux | 2017-01-03 |