SS

Shigeru Shirayone

HH Hitachi High-Technologies: 1 patents #155 of 435Top 40%
Overall (2017): #242,319 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9607874 Plasma processing apparatus Hiroyuki Kobayashi, Tomoyuki Tamura, Masaki Ishiguro, Kazuyuki Ikenaga, Makoto Nawata 2017-03-28