Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805940 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Tatehito Usui, Satomi Inoue | 2017-10-31 |
| 9767997 | Plasma processing apparatus and operational method thereof | Masahito Togami, Tatehito Usui, Kosa Hirota, Satomi Inoue | 2017-09-19 |
| 9741629 | Plasma processing apparatus and plasma processing method | Tatehito Usui, Kosa Hirota, Satomi Inoue, Kousuke Fukuchi | 2017-08-22 |