Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9771649 | Substrate carrier unit for a film deposition apparatus | Chung-Yu Yeh, Cheng-Peng Yeh, Tsung-Wei Chang, Yi-Yuan Huang, Wan-Yu Huang +1 more | 2017-09-26 |
| 9611542 | Film deposition system having a substrate carrier and a cooling device | Cheng-Peng Yeh, Chung-Yu Yeh, Tsung-Wei Chang, Yi-Yuan Huang, Wan-Yu Huang +1 more | 2017-04-04 |