Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715991 | Charged particle beam device and spherical aberration correction method | Yoichi Hirayama | 2017-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715991 | Charged particle beam device and spherical aberration correction method | Yoichi Hirayama | 2017-07-25 |