Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803276 | Method and apparatus for producing low-particle layers on substrates | Michael Vergöhl, Daniel Rademacher, Hans-Ulrich Kricheldorf | 2017-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803276 | Method and apparatus for producing low-particle layers on substrates | Michael Vergöhl, Daniel Rademacher, Hans-Ulrich Kricheldorf | 2017-10-31 |