Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711359 | Shadow trim line edge roughness reduction | Rodolfo P. Belen | 2017-07-18 |
| 9620376 | Self limiting lateral atomic layer etch | Neema Rastgar, Michael Carl Drymon | 2017-04-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711359 | Shadow trim line edge roughness reduction | Rodolfo P. Belen | 2017-07-18 |
| 9620376 | Self limiting lateral atomic layer etch | Neema Rastgar, Michael Carl Drymon | 2017-04-11 |