Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9815690 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2017-11-14 |
| 9764944 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2017-09-19 |