Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9681497 | Multi zone heating and cooling ESC for plasma process chamber | Dmitry Lubomirsky | 2017-06-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9681497 | Multi zone heating and cooling ESC for plasma process chamber | Dmitry Lubomirsky | 2017-06-13 |