Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818585 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Cheng-Hsiung Tsai, Shambhu N. Roy, Puneet Bajaj, David H. Loo | 2017-11-14 |
RG
Richard Green
Overall (2017): #268,793 of 506,227Top 55%
1
Patents 2017