Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659754 | Plasma processing apparatus and plasma processing method | Jun Yoshikawa, Yoshio Susa, Naoki Matsumoto | 2017-05-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659754 | Plasma processing apparatus and plasma processing method | Jun Yoshikawa, Yoshio Susa, Naoki Matsumoto | 2017-05-23 |