Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9755139 | Piezoeletric wet etch process with reduced resist lifting and controlled undercut | Xin Li, Joel Soman, Thomas Warren Lassiter, Mary Alyssa Drummond Roby, YungShan Chang | 2017-09-05 |
| 9716013 | Sloped photoresist edges for defect reduction for metal dry etch processes | Elizabeth Costner Stewart, Yung Shan Chang, Ricky Alan Jackson | 2017-07-25 |
| 9660603 | Sloped termination in molybdenum layers and method of fabricating | Elizabeth Costner Stewart, Nicholas Stephen Dellas | 2017-05-23 |