Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9670581 | Production method of epitaxial silicon wafer and vapor deposition apparatus | Yusuke Kurozumi, Kan Yoshitake, Hitoshi Takamiya | 2017-06-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9670581 | Production method of epitaxial silicon wafer and vapor deposition apparatus | Yusuke Kurozumi, Kan Yoshitake, Hitoshi Takamiya | 2017-06-06 |