Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9782869 | Apparatus for detecting abnormality in polishing of a substrate | Tetsuji Togawa, Hiroyuki Takenaka | 2017-10-10 |
| 9694467 | Polishing method of polishing a substrate | Tetsuji Togawa | 2017-07-04 |
| 9649739 | Polishing apparatus | Kazuaki Maeda, Tamami Takahashi, Hiroaki Kusa | 2017-05-16 |
| 9561573 | Polishing apparatus | Tetsuji Togawa | 2017-02-07 |