Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D804436 | Upper chamber for a plasma processing apparatus | Susumu Tauchi, Takashi Uemura | 2017-12-05 |
| D802545 | Lower chamber for a plasma processing apparatus | Susumu Tauchi, Takashi Uemura | 2017-11-14 |
| D802790 | Cover ring for a plasma processing apparatus | Susumu Tauchi, Takashi Uemura | 2017-11-14 |