Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593411 | Physical vapor deposition chamber with capacitive tuning at wafer support | Daniel J. Hoffman, Karl M. Brown, Ying Rui | 2017-03-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593411 | Physical vapor deposition chamber with capacitive tuning at wafer support | Daniel J. Hoffman, Karl M. Brown, Ying Rui | 2017-03-14 |