Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831186 | Methods of manufacturing semiconductor devices using alignment marks to align layers | Ki Hyun PARK, Byoung-ho Kwon, Dong Chan Kim, Choong Seob Shin, Bo-Un Yoon | 2017-11-28 |
| 9812364 | Method of fabricating semiconductor device with an overlay mask pattern | — | 2017-11-07 |
| 9711395 | Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same | Dong Woon PARK, Tae-Hoi Park, Yong-Kug Bae, Tae-Hwan Oh, Chang-Hoon Lee +1 more | 2017-07-18 |
| D789888 | Electrode plate for semiconductor manufacturing apparatus | Hyun Soo Jang, Jeong Ho Lee, Young-Hoon Kim | 2017-06-20 |
| D785578 | Substrate supporting arm for semiconductor manufacturing apparatus | Woo Chan Kim, Jeong Ho Lee, Hyun Soo Jang | 2017-05-02 |