Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779915 | Plasma generating device comprising a rotating body | — | 2017-10-03 |
| 9564298 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method using the same | Ju Hee Lee, Su Ho Lee, Won Hyuk Jang, Ik Soo Kim, Myoung-Woon Kim | 2017-02-07 |