Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632438 | Phase shift mask and method of forming patterns using the same | Min Kang, Bong-Yeon Kim, Yong-Duck Son, Junhyuk Woo, Hyunjoo Lee +1 more | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632438 | Phase shift mask and method of forming patterns using the same | Min Kang, Bong-Yeon Kim, Yong-Duck Son, Junhyuk Woo, Hyunjoo Lee +1 more | 2017-04-25 |