Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9572237 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | You-Jin Wang, Chung-Shih Pan | 2017-02-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9572237 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | You-Jin Wang, Chung-Shih Pan | 2017-02-14 |