Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719946 | Ellipsometer and method of inspecting pattern asymmetry using the same | Choonshik Leem | 2017-08-01 |
| 9612212 | Ellipsometer and method of inspecting pattern asymmetry using the same | Choonshik Leem | 2017-04-04 |
| 9583402 | Method of manufacturing a semiconductor device using semiconductor measurement system | Sung Yoon Ryu, Wooseok Ko, Souk Kim, Yusin Yang, Sangkil Lee +1 more | 2017-02-28 |