Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786486 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Nampyo Lee, Woosung Han | 2017-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786486 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Nampyo Lee, Woosung Han | 2017-10-10 |