Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799488 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology | Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799488 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology | Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga | 2017-10-24 |