Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9784712 | Split-ring resonator plasma source | Greger Thornell, Martin Berglund | 2017-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9784712 | Split-ring resonator plasma source | Greger Thornell, Martin Berglund | 2017-10-10 |