Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9745188 | Microelectromechanical device and method for forming a microelectromechanical device | Alfons Dehe, Stefan Barzen, Ulrich Krumbein, Wolfgang Klein | 2017-08-29 |
| 9565488 | Micro-electro-mechanical system devices | Alfons Dehe | 2017-02-07 |