Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627335 | Method for processing a semiconductor workpiece and semiconductor workpiece | Stephan Henneck, Evelyn Napetschnig, Daniel Pedone, Bernhard Weidgans, Ivan Nikitin | 2017-04-18 |