Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828237 | MEMS device and MEMS vacuum microphone | Arnaud Walther, Alfons Dehe, Gerhard Metzger-Brueckl | 2017-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828237 | MEMS device and MEMS vacuum microphone | Arnaud Walther, Alfons Dehe, Gerhard Metzger-Brueckl | 2017-11-28 |