Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588440 | Method for monitoring focus in EUV lithography | Timothy A. Brunner | 2017-03-07 |
| 9551924 | Structure and method for fixing phase effects on EUV mask | Emily Gallagher | 2017-01-24 |