Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799534 | Application of titanium-oxide as a patterning hardmask | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy, Indira Seshadri | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799534 | Application of titanium-oxide as a patterning hardmask | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy, Indira Seshadri | 2017-10-24 |