Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671602 | Measurement method for height profiles of surfaces using a differential interference contrast image | Christine Schmidt, Ralf Langhans | 2017-06-06 |
| 9646372 | Inspection apparatus | — | 2017-05-09 |
| 9587930 | Method and assembly for determining the thickness of a layer in a sample stack | — | 2017-03-07 |