Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846073 | On-tool mass flow controller diagnostic systems and methods | Arun Nagarajan | 2017-12-19 |
| 9766635 | Mass flow controller with onboard diagnostics, prognostics, and data logging | Patrick Albright, Cy Jordan, Arun Nagarajan, Michael J. Zolock, Ryan W. Johnson +1 more | 2017-09-19 |
| 9605992 | On-tool mass flow controller diagnostic systems and methods | Arun Nagarajan | 2017-03-28 |
| 9560699 | Microwave processing chamber | Valerie S. Zhylkov, James Hayden Brownell, Stanislav Zhilkov | 2017-01-31 |