Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768012 | Method for processing substrate and substrate processing apparatus | Hirohisa Yamazaki, Masanori Sakai, Tsutomu Kato | 2017-09-19 |
| 9708708 | Method of manufacturing semiconductor device | Noriyuki Isobe, Kenichi Suzaki, Takeshi Kasai, Atsushi Hirano, Koichi Oikawa | 2017-07-18 |
| 9646821 | Method of manufacturing semiconductor device | Tetsuo Yamamoto, Tsutomu Kato, Satoshi Okada | 2017-05-09 |