Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685317 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Yuasa | 2017-06-20 |
| 9601326 | Method of manufacturing semiconductor device, including film having uniform thickness | Tatsuya Yotsutani | 2017-03-21 |